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مکانیک::
حسگر جریان، حسگر جریان
Shoji and Esaslu discussed microfluidics from the device point of view, and considered micropumps, microvalves, and flow sensors [2], This chapter only deals with micropumps, and discusses their design considerations as well as the published design examples.
Nguyen el al. reported a FPW pump with an integrated flow sensor for feedback control [15].
Aluminum and polysilicon form a thermocouple for detecting temperature change in the integrated thermal flow sensor (see Chapter 8)
Because of their tiny size, micromachined thermal flow sensors often consume an electrical, power on the order of several
Since thermal transfer accompanies the mass transfer of a fluid flow, flow sensors based on thermal principles are most common.،Shoji and Esaslu discussed microfluidics from the device point of view, and considered micropumps, microvalves, and flow sensors [2], This chapter only deals with micropumps, and discusses their design considerations as well as the published design examples.
Nguyen el al. reported a FPW pump with an integrated flow sensor for feedback control [15].
Aluminum and polysilicon form a thermocouple for detecting temperature change in the integrated thermal flow sensor (see Chapter 8)
Because of their tiny size, micromachined thermal flow sensors often consume an electrical, power on the order of several
Since thermal transfer accompanies the mass transfer of a fluid flow, flow sensors based on thermal principles are most common.
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